MicroFinish Topographer: Surface Finish Metrology for Large and Small Optics (ABSTRACT)
ABSTRACT: Description of the MicroFinish Topographer (MFT) and why its unique mechanical design largely removes the need for vibration isolation. The paper also describes how the MFT is used for making surface roughness measurements on large and small optics as well as its usefulness for on-machine measurement due to its small size and light weight.
Tags Optical metrology
, Surface finish
, Surface Roughness
, Surface Topography Measurement