ABSTRACT: A tutorial on use of the structure function (SF) as a specification to limit the effects of mid-spatial frequency roughness. The paper points out that the SF units of measurement are familiar to opticians and optical engineers and that it is easy to calculate the SF without making ambiguous assumptions as opposed to the use of Power Spectral Density function (PSD).
ABSTRACT: A paper by Del Hoyo, et. al., showing how the MicroFinish Topographer (MFT) was used for in process control assessment of the removal of high spatial frequency polishing errors during polishing as a function of type of polishing compound and polishing pad. The MFT was particularly useful for determining when a surface was fully polished out, that is, had no defects left from previous steps in the lapping and polishing process.